[rp-ml] Etching of silicon

From: Ian Gibson (mpegi@nus.edu.sg)
Date: Fri Feb 02 2007 - 10:03:14 EET

Dear rp-ml

I was wondering whether anyone on this list has the facilities for
etching silicon? I have a requirement for a circular piece of silicon
(around 0.5mm thick) to be etched with a 2mm square cavity approx.
0.3mm deep. The sides of the hole should be around 50 degrees taper.
In the centre of the cavity, there should be a small hole, around
0.2mm diameter.

I have the actual drawings if anyone is able to fabricate such a
piece. Please contact me off-list if you are able to assist.



Dr. Ian Gibson
Associate Prof.
Dept. Mechanical Engineering
National University of Singapore

tel: +65 9277 7343

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