Etching of CVD Silicon Carbide

From: AHastbacka@aol.com
Date: Mon Mar 17 2003 - 04:25:28 EET


Has anyone on the list used either a wet or dry etching process to produce fine features (2- 10 microns) in CVD SiC? If you have, please let me know how well it worked.

Regards,
Al Hastbacka



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